|
Course Discription |
:
Introduction to Nanotechnology, Microtechnology and MEMS, applications and markets, scaling of micromechanical devices, mechanical properties of MEMS materials, Silicon material systems, flow physics, liquid flows in microchannels, molecular-based microfluidic simulation models, fundamentals of control theory, model-based flow control for distributed architectures, soft computing in control, materials for microelectromechanical systems, MEMS fabrication, LIGA and other replication techniques, x-ray based fabrication, packaging MEMS, Application of MEMS. |